Search for "AFM nanolithography" in Full Text gives 4 result(s) in Beilstein Journal of Nanotechnology.
Beilstein J. Nanotechnol. 2016, 7, 1044–1051, doi:10.3762/bjnano.7.97
Beilstein J. Nanotechnol. 2016, 7, 544–553, doi:10.3762/bjnano.7.48
Beilstein J. Nanotechnol. 2012, 3, 817–823, doi:10.3762/bjnano.3.91
Beilstein J. Nanotechnol. 2010, 1, 158–162, doi:10.3762/bjnano.1.19